The photolithographic manufacturing processes developed by HEIDENHAIN permit grating periods up to:

40 μm with AURODUR

20 μm with METALLUR

10 μm with DIADUR

4 μm and finer with three-dimensional grating structures (Phase grating) and with SUPRADUR.

These processes permit very fine grating periods and are characterized by a high definition and homogeneity of the line edges. Together with the photoelectric scanning method, this high edge definition is a precondition for the high quality of the output signals. Graduations from HEIDENHAIN are resistant to mechanical and chemical influences as well as to vibration and shock. They have a defined thermal behavior.